Enabling Technologies for MEMS and Nanodevices
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional siliconprocessing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in massdata storage and electrochemical imaging by means of scanning micro- and nanoprobes.The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
| EAN: | 9783527334988 |
|---|---|
| Sprache: | Englisch |
| Seitenzahl: | 427 |
| Produktart: | kartoniert, broschiert |
| Herausgeber: | Baltes, Henry Brand, Oliver Fedder, Gary K. Hierold, Christofer Korvink, Jan G. Tabata, Osamu |
| Verlag: | Wiley-VCH |
| Veröffentlichungsdatum: | 13.09.2013 |
| Untertitel: | Advanced Micro and Nanosystems |
| Schlagworte: | MEMS (Mikroelektromechanische Systeme) Nanotechnologie |
| Größe: | 20 × 170 × 240 |
| Gewicht: | 864 g |
