Predictive Simulation of Semiconductor Processing
261,00 €*
Sofort verfügbar, Lieferzeit: 1-3 Tage
Produktnummer:
9783540204817
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
| EAN: | 9783540204817 |
|---|---|
| Sprache: | Englisch |
| Seitenzahl: | 490 |
| Produktart: | Gebunden |
| Herausgeber: | Dabrowski, Jarek Weber, Eicke R. |
| Verlag: | Springer Springer, Berlin Springer Berlin Heidelberg |
| Untertitel: | Status and Challenges |
| Schlagworte: | Halbleiterbauelemente |
| Größe: | 235 |
| Gewicht: | 850 g |
