Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
179,00 €*
Sofort verfügbar, Lieferzeit: 1-3 Tage
Produktnummer:
9780792350088
An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
| EAN: | 9780792350088 |
|---|---|
| Sprache: | Englisch |
| Seitenzahl: | 507 |
| Produktart: | kartoniert, broschiert |
| Herausgeber: | Garfunkel, Eric Gusev, Evgeni Vul', Alexander |
| Verlag: | Springer Springer Netherlands |
| Schlagworte: | Dielektrizität Silicium / Silizium |
| Größe: | 160 × 240 |
| Gewicht: | 1590 g |
